کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1690151 | 1011251 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Evaluation of annular pupil for scanning transmission electron microscope formed by focused ion beam technique
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Annular pupils for electron optics were developed using a focused ion beam (FIB) technique to realize an increase in the depth of focus, aberration-free imaging and separation of amplitude and phase images under scanning transmission electron microscopy (STEM). A tantalum plate 30 μm thick was used as the annular pupil material in the present experiment. The annular pupils were designed with various outer diameters from Ï120 μm to Ï40 μm. The inner diameter was designed at 60 to 80% of the outer diameter. The fabricated annular pupils were inspected by scanning ion beam microscopy and scanning electron microscopy. Annular pupils were successfully obtained at the designed size, although the slits of the pupils were slightly tapered by the ion beam etching process. These annular pupils were loaded on a STEM and confirmed to display no charge-up phenomenon by observation of the projection image on a scintillator using a CCD camera. We confirmed the image taken by annular pupil with narrow width was able to suppress the influence of the normal illumination.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 83, Issue 1, 4 September 2008, Pages 201-204
Journal: Vacuum - Volume 83, Issue 1, 4 September 2008, Pages 201-204
نویسندگان
Takaomi Matsutani, Masaki Taya, Takashi Ikuta, Tetsuya Fujimura, Hirohiko Inui, Takeo Tanaka, Ippei Shimizu, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi,