Micro-structured electrode arrays: Glow discharges in Ar and N2 at atmospheric pressure using a variable radio frequency generator

Micro-structured electrode (MSE) arrays consist of an interlocked, comb-like, capacitive electrode system with gap widths in the μm range. Large-area uniform glow discharges up to atmospheric pressure were penetrated with our arrays. In order to ignite glow discharges at atmospheric pressure this approach is established next to using dielectric barrier arrays and plasma jets. Because of the industrial, scientific and medical (ISM) limitation of available radio frequencies the usual frequency for experiments is 13.56 MHz. Using a variable radio frequency generator more information about the frequency dependent breakdown mechanisms are gained. The electric parameters of the non-thermal plasma system are characterized by a special probe with an upper frequency detection limit of 60 MHz.