Transport coefficients and electron energy probability function in Ar-He 13.56Â MHz hollow cathode discharge

The electron swarm parameters of Ar/He mixtures in a low pressure 13.56 MHz hollow cathode discharge in remote plasma are analyzed utilizing Boltzmann equation method. These parameters are important to understand the mechanism of plasma dynamics and could not be measured directly. In this work, we calculate the electron energy distribution functions (EEDF), compare them with experimental results, and determine the mobility, the drift velocity, the average electron energy and the diffusion coefficients in pure argon and in Ar/He mixtures.