Simulation of the organic thin film thickness distribution for multi-source thermal evaporation process

A model of multi-source thermal evaporation process was proposed to achieve higher deposition rate and uniformity of organic thin film. In this model, several point type sources were uniformly distributed around a circle and evaporated simultaneously to form a surface-like source. Based on the Monte Carlo method, the evaporation process was simulated, and the effect of the number of point type sources, circle radius and source-substrate distance on the uniformity was analyzed. Based on the method proposed in this paper, the uniformity of the thickness in the organic layer was successfully controlled in 5%.