کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691136 1011296 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Optimization of ion energy spread in inductively coupled plasma source designed for focused ion beam applications
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Optimization of ion energy spread in inductively coupled plasma source designed for focused ion beam applications
چکیده انگلیسی

The ion energy distribution of inductively coupled plasma ion source for focused ion beam application is measured using a four grid retarding field energy analyzer. Without using any Faraday shield, ion energy spread is found to be 50 eV or more. Moreover, the ion energy distribution is found to have double peaks showing that the power coupling to the plasma is not purely inductive, but a strong parasitic capacitive coupling is also present. By optimizing the various source parameters and Faraday shield, ion energy distribution having a single peak, well separated from zero energy and with ion energy spread of 4 eV is achieved. A novel plasma chamber, with proper Faraday shield is designed to ignite the plasma at low RF powers which otherwise would require 300–400 W of RF power. Optimization of various parameters of the ion source to achieve ions with very low energy spread and the experimental results are presented in this article.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 85, Issue 2, 20 August 2010, Pages 344–348
نویسندگان
, , , , ,