کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691266 1011305 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Infrared transmission properties of germanium carbon thin films deposited by reactive RF magnetron sputtering
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Infrared transmission properties of germanium carbon thin films deposited by reactive RF magnetron sputtering
چکیده انگلیسی

Germanium carbon (GeC) thin films were prepared on ZnS substrates by reactive RF magnetron sputtering in Ar and CH4 mixtures with a Ge disc as the target. H content in the films was studied as a function of the deposition parameters and low H content GeC film was obtained. RF power had a little effect on IR absorptions, hence had a little effect on H content. IR absorption of the GeC film increased a little with the increase in partial pressure of CH4 as well as total pressure of gas mixture. Increase in substrate temperature decomposed CH4 and CHx in the GeC film into C and H and H was desorbed from the film, lowering the IR absorption. However, high substrate temperature prevented CH4 or CHx from adsorbing onto the substrate, which decreased C content in the GeC film and increased the film's refractive index. Higher annealing temperature of the GeC film reduced H content, but high annealing temperature (500 °C) caused the graphitization of the GeC film and destroyed its continuity.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 83, Issue 6, 12 February 2009, Pages 965–969
نویسندگان
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