کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691311 1011308 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Influence of repeller potential on ion–molecule reactions in methane and carbon tetrafluoride mixtures
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Influence of repeller potential on ion–molecule reactions in methane and carbon tetrafluoride mixtures
چکیده انگلیسی

Investigations of ion–molecule reactions were performed for methane–carbon tetrafluoride mixtures of different compositions. Concentration of methane in these mixtures ranged from 10% to 90% (at 10% increment) and total mixture pressure was fixed at 13.3 Pa. Measurements were made using a quadrupole mass spectrometer with a high-pressure ion source. Primary ions CH4+, F+, CF+ and CF3+ were produced by electrons with energy of 300 eV. Secondary ions CH5+, C2H3+, C2H4+, C2H5+, C2H7+ and CF3+ were observed as the result of ion–molecule reactions.The influence of repeller potential on ion–molecule reactions efficiency was examined.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 82, Issue 10, 3 June 2008, Pages 1079–1082
نویسندگان
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