کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1691311 | 1011308 | 2008 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of repeller potential on ion–molecule reactions in methane and carbon tetrafluoride mixtures
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
Investigations of ion–molecule reactions were performed for methane–carbon tetrafluoride mixtures of different compositions. Concentration of methane in these mixtures ranged from 10% to 90% (at 10% increment) and total mixture pressure was fixed at 13.3 Pa. Measurements were made using a quadrupole mass spectrometer with a high-pressure ion source. Primary ions CH4+, F+, CF+ and CF3+ were produced by electrons with energy of 300 eV. Secondary ions CH5+, C2H3+, C2H4+, C2H5+, C2H7+ and CF3+ were observed as the result of ion–molecule reactions.The influence of repeller potential on ion–molecule reactions efficiency was examined.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 82, Issue 10, 3 June 2008, Pages 1079–1082
Journal: Vacuum - Volume 82, Issue 10, 3 June 2008, Pages 1079–1082
نویسندگان
Artur Markowski, Leszek Wójcik,