کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1691409 1011314 2008 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Plasma processes at atmospheric and low pressures
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Plasma processes at atmospheric and low pressures
چکیده انگلیسی

In the last few decades there has been an intense development in non-equilibrium (“cold”) plasma surface processing systems at atmospheric pressure. This new trend is stimulated mainly to decrease equipment costs by avoiding expensive pumping systems of conventional low-pressure plasma devices. This work summarizes physical and practical limitations where atmospheric plasmas cannot compete with low-pressure plasma and vice-versa. As the processing conditions for atmospheric plasma are rather different from reduced pressure systems in many cases these conditions may increase final equipment costs substantially. In this work we briefly review the main principles, advantages and drawbacks of atmospheric plasma for a better understanding of the capabilities and limitations of the atmospheric plasma processing technology compared with conventional low-pressure plasma processing.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 83, Issue 3, 15 October 2008, Pages 522–527
نویسندگان
, ,