Frictional property with preferred crystal orientation of platinum oxide and palladium oxide coatings synthesized by combinatorial sputter coating system

The combinatorial sputter coating system (COSCOS) has been newly developed, that can fabricate various kinds of coatings under precisely controlled lots of conditions such as selection of sputter gas and gas pressure, gas partial pressure, r.f. power, substrate temperature, distance between a substrate and a target, etc. COSCOS can also control the crystal preferred orientation of coatings which strongly affect those frictional property. Platinum oxide and palladium oxide coatings were synthesized by COSCOS, then the crystal structure was analyzed with X-ray diffraction spectroscopy and frictional properties of the coatings were measured by a tribometer at an atmospheric pressure.