Photocatalytic properties of Au/TiO2 thin films prepared by RF magnetron co-sputtering

Au/TiO2 thin films with various Au doping contents were deposited on quartz substrates by radio frequency (RF) magnetron co-sputtering. The as-deposited Au/TiO2 films were characterized by energy-dispersive X-ray spectroscopy (EDS), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), XRD, and UV–vis techniques. Au doping and UV treatment enhanced the photocatalytic efficiency of TiO2 thin films. The optimal RF power of the Au target and UV treatment time were 5 W and 1 h, respectively. The enhanced photoactivity of Au(5 W)/TiO2 thin films with UV treatment is found to result from the increased hydroxyl concentration.