Modelling of high speed selective jet electrodeposition process

High speed selective jet electrodeposition (HSSJE) employs a jet of electrolyte with potential difference between anode and cathode for deposition at cathode. The HSSJE process is a new process and is at its developmental stage. The HSSJE process can be utilized for maskless fabrication of metallic micro features for micro electro mechanical systems (MEMS) and other applications. The HSSJE process uses an electrolyte jet which makes the process difficult to control. A theoretical model as well as analysis is necessary for design and development of control system of HSSJE process. In this work, mathematical models for predicting deposition rate and deposition height with respect to input process parameters (applied voltage, concentration of metal ions, and inter electrode gap) have been developed. This model also predicts the distribution of potential gradient on the substrate surface and potential distribution within the jet. Experimental study has also been conducted to validate the proposed model.