کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1785424 | 1023379 | 2015 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: 2D strain measurement in sub-10 nm SiGe layer with dark-field electron holography 2D strain measurement in sub-10 nm SiGe layer with dark-field electron holography](/preview/png/1785424.png)
• We can measure 2D strain in sub-10 nm SiGe layer using dark-field electron holography.
• The strain distribution is clearly uniform and smooth over the whole SiGe layer.
• The measured results were compared to the X-ray diffraction (XRD) results.
In this paper, we carried out the two-dimensional (2D) strain measurement in sub-10 nm SiGe layer; images were obtained by dark-field electron holography (DFEH). This technique is based on transmission electron microscopy (TEM), in which dark-field holograms were obtained from a (400) diffraction spot. The measured results were compared to the X-ray diffraction (XRD) results in terms of the strain value and the depth of strain distribution in a very thin SiGe layer. Subsequently, we were able to successfully analyze the 2D strain maps along the [100] growth direction of the nanoscale SiGe region. The strain was measured and found to be in the range of 1.8–2.4%. The strain precision was estimated at 2.5 × 10−3. As a result, the DFEH technique is truly useful for measuring 2D strain maps in very thin SiGe layers with nanometer resolution and high precision.
Journal: Current Applied Physics - Volume 15, Issue 11, November 2015, Pages 1529–1533