Upgrade of long trace profiler for characterization of high-precision X-ray mirrors at SPring-8

The long trace profiler (LTP) at SPring-8 has been upgraded to improve stability and resolution of slope measurement. The performances of the upgraded LTP at SPring-8 are presented by cross-checking measurements on a flat mirror with data obtained using Nanometer Optical Component Measuring Machine (NOM) at the Helmholtz Zentrum Berlin / BESSY-II.