The dynamics of the interaction of fast electrons with dielectric surfaces at grazing incidence

• The first model to describe the guiding process of a 10-keV electron beam by dielectric surface was developed.
• The model can describe time processes during electron–surface interaction.
• The model takes into account secondary electron emission from the surface.
• The function of charge up dependence on angle of incidence is proposed.
• The mechanism of charge leakage is proposed for one-dimensional model.

For the first time a classical model was developed to describe quantitatively the dynamics of charge distribution formation on a planar dielectric surface during its irradiation by fast electrons at a grazing incidence. The dynamic effects of the mutual influence of the beam and the dielectric surface charge predicted by the developed model are in a good agreement with the performed experiments. The proposed model can be used to describe time dependent processes of the electron beam–dielectric surface interaction, charging up and discharging for dielectric channels of more complex shapes.