Measurements of L shell X-ray yields of thick Ag target by 6–29 keV electron impact

• We measured L shell X-ray yields of thick Ag target by 6–29 keV electrons.
• Our measured X-ray yields are in good agreement with the MC results with ~10%.
• L shell production cross sections are obtained based on the measured X-ray yields.
• L shell production cross sections obtained are in good agreement with theories.

In this paper, the L shell X-ray yields for a thick Ag target have been measured at incident electron energies of 6–29 keV. The experimental values are compared with the Monte Carlo simulation results that are obtained by using the PENELOPE code, in which the inner-shell ionization cross sections by electron impact calculated in the theoretical frame of distorted wave Born approximation are used. The experimental and simulation values are in agreement with ~10% difference. Meanwhile, the L shell X-ray production cross sections are also obtained based on the measured L shell X-ray yields for a thick Ag target in this paper, and are compared with other experimental Ag L shell X-ray production cross section data by electron and positron impact measured previously and some theoretical models. Some factors that could affect these comparisons are also discussed in this paper.