Investigation on the competitive fracture behavior in nano-multilayered structures

• The competitive fracture behavior in NMSs is investigated.
• The fracture pattern in a nano-multilayered specimen is well predicted.
• The cohesive zone parameters of SiN/Cu interface in NMSs are obtained.
• The fracture behavior in NMSs can be designed for the specific research objective.

The competitive fracture behavior in nano-multilayered structures is investigated by a new analysis method combining the interaction energy integral method and the cohesive zone model. Different fracture patterns including crack initiation in the SiN layer and interface debonding at the SiN/Cu interface are investigated systematically, and the fracture pattern in a nano-multilayered specimen is well predicted. The cohesive zone parameters of the SiN/Cu interface are also obtained, which are very difficult to test directly. This study will provide reliable guidance for the fracture strength test and the design of nano-multilayered structures and hence be of great significance.