کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
279696 1430353 2008 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Multi-layer thin films/substrate system subjected to non-uniform misfit strains
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی عمران و سازه
پیش نمایش صفحه اول مقاله
Multi-layer thin films/substrate system subjected to non-uniform misfit strains
چکیده انگلیسی

Current methodologies used for the inference of thin film stress through curvature measurement are strictly restricted to stress and curvature states that are assumed to remain uniform over the entire film/substrate system. These methodologies have recently been extended to a single layer of thin film deposited on a substrate subjected to the non-uniform misfit strain in the thin film. Such methodologies are further extended to multi-layer thin films deposited on a substrate in the present study. Each thin film may have its own non-uniform misfit strain. We derive relations between the stresses in each thin film and the change of system curvatures due to the deposition of each thin film. The interface shear stresses between the adjacent films and between the thin film and the substrate are also obtained from the system curvatures. This provides the basis for the experimental determination of thin film stresses in multi-layer thin films on a substrate.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: International Journal of Solids and Structures - Volume 45, Issue 13, 30 June 2008, Pages 3688–3698
نویسندگان
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