کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
280282 1430401 2005 27 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی عمران و سازه
پیش نمایش صفحه اول مقاله
Modeling MEMS resonators with rod-like components accounting for anisotropy, temperature, and strain dependencies
چکیده انگلیسی

Numerous systems can be described using masses and rods in transverse vibration. Motivated by the desire to model the effects of axial strain and temperature on systems of this type, we develop a procedure to determine the frequencies of transverse vibration of devices composed of rods and rigid masses as functions of these effects. Our models allow for the rods to be composed of anisotropic materials with material symmetry contained in the cubic system. The goal of the present paper is to demonstrate the modeling procedure using the example of a double-ended tuning fork (DETF). Following this, the results of a slightly more complicated model are compared with the experimental results found for a prototype MEMS DETF sensor composed of polycrystalline silicon.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: International Journal of Solids and Structures - Volume 42, Issue 26, December 2005, Pages 6523–6549
نویسندگان
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