The tribological behaviors between fullerene-like hydrogenated carbon films produced on Si substrates, steel and Si3N4 balls

Fullerene-like hydrogenated carbon (FL-C:H) films were prepared on Si substrates, steel and Si3N4 balls by plasma enhanced chemical vapor deposition with methane gas. The frictional behaviors of steel/FL-C:H, Si3N4/FL-C:H, F-steel/FL-C:H and F-Si3N4/FL-C:H couples were investigated and their worn surfaces were analyzed by scanning electron microscopy (SEM) and 3D surface profiles. The results showed that the F-steel/FL-C:H and F-Si3N4/FL-C:H couples had lower friction and wear than the steel/FL-C:H and Si3N4/FL-C:H ones, respectively. The tribological differences are due to the change of microstructures and accordingly mechanical properties for FL-C:H films on a Si substrate, steel and Si3N4 balls.