Adsorption characteristics and kinetics of organic airborne contamination for the chemical filters used in the fan-filter unit (FFU) of a cleanroom

Adsorption characteristics and kinetics of organic airborne contamination for the chemical filters used in the fan-filter unit (FFU) of a cleanroom

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of the Taiwan Institute of Chemical Engineers - Volume 75, June 2017, Pages 87-96

Hu Shih-Cheng, Chang Andy, Angus Shiue, Lin Ti, Liao Song-Dun,