Effect of an optical emission spectrometer feedback-controlled method on the characterizations of nc-TiC/a-C:H coated by high power impulse magnetron sputtering

An optical emission spectrometer (OES) feedback-controlled high power impulse magnetron sputter deposition system was used to deposit nc-TiC/a-C:H thin films in a reactive mode. A key point, the properties and phase change from TiC to nc-TiC/a-C:H films, was clearly discriminated at the OES intensity of 40%. Result the highest hardness of 26 GPa was obtained at the OES intensity of 40%, where the film was composed of TiC. In addition, the lowest friction coefficient of 0.08 was obtained at the OES intensity of 7%, which represents the nanocomposite structure of nc-TiC/a-C:H films. As a result, HiPIMS deposited nc-TiC/a-C:H films exhibit different microstructures, mechanical properties and wear properties, which can be controlled by the OES feedback mechanism.630