A novel hybrid method combining ASP with PECVD for in-situ low temperature synthesis of vertically aligned carbon nanotube films

A novel hybrid method combining ASP with PECVD for in-situ low temperature synthesis of vertically aligned carbon nanotube films

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Diamond and Related Materials - Volume 77, August 2017, Pages 16-24

Xiaochao Ji, Wei Zhang, Xiaoying Li, Helong Yu, Hanshan Dong,