کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5002520 1368454 2016 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Modelling and Compensation of Thermally Induced Positioning Errors in a High Precision Positioning Application*
ترجمه فارسی عنوان
مدل سازی و جبران خطاهای موقعیت یابی حرارتی در یک برنامه موقعیت دقیق *
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مکانیک محاسباتی
چکیده انگلیسی

:Thermal scanning probe lithography (t-SPL) is a promising technology to create patterns at the nanometre scale. So far, a commercially available t-SPL tool only exists for small, centimetre scale work pieces typically used in the university research environment. Scaling this technology to work with industry standard wafers requires much larger mechanical positioning units. These are subject to thermally induced deformations and consequently positioning errors. This work suggests a model based compensation of a mechanical positioning unit in combination with a direct position measurement enabled by the t-SPL patterning tool. Based on a linear model of the positioning unit, a Kalman based filter is designed, to estimate thermal errors during the patterning process and use position measurements between patterning phases for re-calibration. The presented filter does not require additional measurement equipment for the compensation. An application of the presented algorithm on an experimental set-up shows a significant reduction of thermally induced position errors.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: IFAC-PapersOnLine - Volume 49, Issue 21, 2016, Pages 347-353
نویسندگان
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