Polymer-derived SiAlOC ceramic pressure sensor with potential for high-temperature application

In this paper, a pressure sensor made of polymer-derived SiAlOC ceramics is designed, fabricated and tested. The sensor package is composed of a SiAlOC sensor head and a serially connected divider resistor. The requirement of the divider resistor is to achieve maximum sensitivity. The results showed that the pressure sensor has high accuracy, stability, and repeatability to both unidirectional and bidirectional pressure variations. While the sensor is tested at room temperature, it has potential for high temperature applications due to the excellent high-temperature capability of the polymer-derived SiAlOC ceramic.