The effect of surface roughness on the vibration behavior of AFM piezoelectric MC in the vicinity of sample surface in air environment based on MCS theory

- The effect of surface roughness has been investigated in Micro and Nano scales according to the types of the surface roughness.
- The micro cantilever (MC) modeling has been schemed based on the Multiple Couple Stress (MCS) Theory
- The effect of roughness radius on the minimum and maximum amplitude of Piezoelectric MC has been studied based on the geometry of roughness in air environment.
- The effect of environmental forces including van der Waals, Capillary and Contact Forces on the vibration amplitude of MC forms the basis of surface topography.

Recent developments in the field of piezoelectric materials have led to the increasing use of piezoelectric materials in a variety of Atomic Force Microscopy (AFM). Utilizing piezoelectric layer as a sensor and actuator not only reduces the size of microscope but also enhances the quality of surface topography in Micro and Nano scales. In the current study, the effect of surface roughnesson the vibration behavior of AFM piezoelectric micro cantilever (MC) has been investigated in Micro and Nano scales according to the types of the surface roughness. Furthermore, the micro cantilever modelling has been schemed based on the Modified Couple Stress (MCS) theoryin order to model the vibration amplitude of AFM piezoelectric MC that precisely indicates the measured surface roughness. Besides, according to the various modelling of surface roughness, the effect of roughness radius on the minimum and maximum amplitude of Piezoelectric MC has been studied based on the geometry of roughness in air environment. In this environment, the effect of environmental forces including van der Waals, Capillary and contact forces on the vibration amplitude of MC forms the basis of surface topography which has, also, been studied in this article. Moreover, the present study intends to investigate the effect of surface roughness on the vibrating amplitude of MC in both the Tapping and Non-Contact Modes.