Metal phosphate and fluoride catalysts active for hydrolysis of NF3

NF3 was decomposed over various ortho, pyrophosphates and some fluorides at 450–600 K. Mn2P2O7 and CePO4 were the most active. The catalytic activity of Co2P2O7, Co3(PO4)2, CrPO4, Cu2P2O7, and Cr4(P2O7)3 followed in this order. Zn3(PO4)2 and AlPO4 were less active. Activity of pyrophosphate was comparable to that of ortho-phosphate. Products were NO2 and a very small amount of N2O except for HF. An essential reaction was 2NF3 + 3H2O → 6HF + NO + NO2. Catalytic activity of phosphates was proportional to not the amount but the concentration of surface hydroxyls, suggesting that the reaction proceeds via a bidentate surface intermediate.