Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias

Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 410, 15 July 2017, Pages 51-59

Ting Guo, Cuicui Kong, Xiaowei Li, Peng Guo, Zhenyu Wang, Aiying Wang,