Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist

Effects of AFM tip-based direct and vibration assisted scratching methods on nanogrooves fabrication on a polymer resist

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 356, 30 November 2015, Pages 348-354

Yanquan Geng, Yongda Yan, Yun Zhuang, Zhenjiang Hu,