Use of 3-aminopropyltriethoxysilane deposited from aqueous solution for surface modification of III-V materials

- HCl and citric acid showed excellent oxide removal on III/V surfaces.
- Aminosilane (APTES) passivation coatings were deposited at 1-20 nm on InAs and GaSb.
- These coatings showed high ionic nitrogen levels near the interface via XPS.
- DFT was used to find adsorption energies of APTES with and without OH groups.
- DFT modeling showed APTES-NH3+ hydrogen abstraction to form surface OH groups.