کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5351318 | 1503657 | 2014 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Recovery of SIMS depth profiles with account for nonstationary effects
ترجمه فارسی عنوان
بازیابی پروفایل های عمق سیمز با توجه به اثرات غیر استثنایی
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
چکیده انگلیسی
In this work we consider a method of accounting for the nonstationary effects in recovery of SIMS depth profiles. The depth resolution function (DRF) is described by Hofmann's nonstationary MRI (mixing-roughness-information depth) model using the depth-dependent parameters. The effects in question include the nonstationary atomic mixing and development of surface roughness. A mathematical description of the nonstationary depth profiling process by the Fredholm integral equation of the first kind is proposed. The inverse problem is solved using an algorithm based on the Tikhonov regularization method. The proposed nonstationary recovery method is tested on both model and real structures. The development of surface roughness in SIMS depth profiling of the real structure was observed. Grazing incidence x-ray reflectometry (XRR) technique was used to verify the results of SIMS profiles restoration for periodic structure containing thin Ge layers in the Si matrix. The advantages of the proposed recovery algorithm to allow for the nonstationary effects are shown.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 307, 15 July 2014, Pages 33-41
Journal: Applied Surface Science - Volume 307, 15 July 2014, Pages 33-41
نویسندگان
Pavel Andreevich Yunin, Yurii Nikolaevich Drozdov, Mikhail Nikolaevich Drozdov, Dmitry Vladimirovich Yurasov,