Boron and nitrogen co-doping of diamond-like carbon film for transparent conductive films

We demonstrate boron and nitrogen co-doping of diamond-like carbon (DLC) film by vaporizing borane ammonia for applications in anti-scratch and extremely robust transparent conductive films. This method allows for facile fabrication of boron and nitrogen co-doped DLC (BNDLC) film with ultra-flat surface and uniform thickness. The simultaneous occurrence of graphitization and boron and nitrogen co-doping of DLC film induced by increasing the co-doping temperature was observed and lead to a significant decrease in the sheet resistance. As a result, the sheet resistance and optical transmittance at 550 nm of the BNDLC were 3.53 ± 0.19 kΩ/sq and 81.25%, respectively.