X-ray spectroscopic methods in the studies of nonstoichiometric TiO2−x thin films

► Thin films of TiO2−x are deposited by means of dc-pulsed reactive sputtering. ► X-ray spectroscopic techniques are used to study electronic and structural properties. ► Contribution from Ti3+ oxidation states appears in nonstoichiometric TiO2−x. ► Band gap energies derived from the optical spectra and RXES analysis are consistent.