Si-rich a-Si1−xCx thin films by d.c. magnetron co-sputtering of silicon and silicon carbide: Structural and optical properties

▸ A new method Si-rich amorphous silicon carbide thin films have been elaborated. ▸ Using Si monocrystal and 6H-SiC polycrystal as targets to elaborate a-SiC films. ▸ Variation number of 6H-SiC has been used to elaborate thin a-Si1−xCx:H films. ▸ The properties of a-Si1−xCx:H varies with carbon content x.