Synthesis of Al2O3 thin films using laser assisted spray pyrolysis (LASP)

▸ Alumina thin films were made by laser assisted spray pyrolysis at various laser powers. ▸ The particle size was found to increase with laser power. ▸ The refractive index of the films was studied using ellipsometry. ▸ The film stoichiometry was studied using X-ray photoelectron spectroscopy. ▸ The film/substrate interface was studied using ellipsometer and secondary ion mass spectrometer.