Transparent and conductive electrodes combining AZO and ATO thin films for enhanced light scattering and electrical performance

► Transparent Al:ZnO (AZO) and Sb:SnO2 (ATO) films were sputtered on glass substrates. ► Optical scattering or haze is related to the surface roughness determined by AFM. ► ATO/AZO bilayers combine high optical scattering and electrical conductivity values.