Growth mechanisms for Si epitaxy on O atomic layers: Impact of O-content and surface structure

Growth mechanisms for Si epitaxy on O atomic layers: Impact of O-content and surface structure

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 384, 30 October 2016, Pages 152-160

Suseendran Jayachandran, Arne Billen, Bastien Douhard, Thierry Conard, Johan Meersschaut, Alain Moussa, Matty Caymax, Hugo Bender, Wilfried Vandervorst, Marc Heyns, Annelies Delabie,