Reactive growth of MgO overlayers on Fe(0Â 0Â 1) surfaces studied by low-energy electron diffraction and atomic force microscopy

► Reactive growth of ultra-thin MgO films on the Fe(0 0 1) surface was investigated. ► This method gives full control over the gaseous species that reach the surface. ► Preparation required a protocol that prevents overoxidation of the Fe(0 0 1) surface. ► The effect of annealing during and after the growth was studied. ► The reactive deposition method can produce terraces as large as 10 nm.