Magnetic properties and microstructure of TbxDy1−xFe2 thin films sputtered on Pt/TiO2/SiO2/Si substrate

► TbxDy1−xFe2 thin films are grown on Pt/TiO2/SiO2/Si substrate by sputtering. ► Ferromagnetic properties are investigated while changing the deposition conditions. ► Magnetization of 680 emu/cm3 is achieved in a 140 nm thick TERFENOL-D film. ► The microstructure of the films are investigated by XRD and TEM. ► The good ferromagnetic properties are related to crystallization of nano-grains.