Al-Cu intermetallic coatings processed by sequential metalorganic chemical vapour deposition and post-deposition annealing

► Sequential MOCVD of Al and Cu metals. ► Process feasibility ensured by appropriate selection of Al and Cu MOCVD precursors. ► Al/Cu ratio and annealing temperature drives the nature of Al-Cu phases. ► In situ monitored post deposition annealing allows formation of targeted Al-Cu phases.