Evolution of β-SiC in laser-generated plasmas

► Compact, homogeneous, crack-free β-SiC thin films were pulsed laser deposited. ► The films were characterised by SEM, TEM, FTIR, m-Raman spectroscopy. ► The films were directly irradiated with ns laser pulses and their morphology and nano-structure were investigated by FTIR, SEM, EDX, TEM, m-Raman. ► The films were irradiated by a plasma produced by irradiation with fs laser pulses a low-density polyethylene (LDPE) foil placed in front of the β-SiC. ► The indirect irradiation results in a laser-induced periodic surface structure on β-SiC. ► β-SiC shows meaningful chemical and structural stability in highly energetic, aggressive plasma ambient.