Three dimensional imaging using secondary ion mass spectrometry and atomic force microscopy

► We present a method for correcting the 3D secondary ion distribution using AFM. ► We compare traditional SIMS 3D imaging with AFM corrected SIMS 3D imaging. ► AFM-SIMS permits a more accurate determination of the sputter rate. ► AFM-SIMS allows the accurate localization secondary ion signal hotspots. ► AFM scanning of the sputter zone allows accurate determination of the ion fluence.