ZnO thin film characterization by X-ray reflectivity optimization using genetic algorithm and Fourier transformation

► We applied Parrat's recursive model for constructing theoretical X-ray reflectivity of ZnO thin film. ► Independent information was exploited from Fourier transform of Fresnel reflectivity normalized experimental X-ray reflectivity. ► Optimization was established by constructing the error function describes discrepancy between reflectivities. ► Genetic algorithm optimization yielded structural parameters such as thickness, roughness and EDP of the film.