Microstructure and strain relaxation in thin nanocrystalline platinum films produced via different sputtering techniques

- Residual strain relaxation in nano crystalline platinum films was investigated.
- Magnetron sputtered and ion beam sputtered Pt films are compared.
- XRD measurements were carried out using synchrotron radiation.
- Thickness fringes in the Bragg peak give information on microstructure.
- Residual strain relaxation is stronger in films composed of equally oriented columns.