Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

► Increase of magnetron discharge power results in densification of a-SiC:H thin films. ► The denser a-SiC:H material the better resistance to oxidation by oxygen. ► Oxidation of soft a-SiC:H films can result in increase of electric conductivity. ► Formation of graphitic clusters was found in a-SiC:H after annealing in oxygen.