Optical and hydrophobic properties of co-sputtered chromium and titanium oxynitride films

► Ti-doped chromium oxynitride and Cr-doped titanium oxynitride films at Cr and Ti targets powers. ► Such co-sputtering studies using helium as inert gas is rare in literature. ► This article deals with a systematic study on structural, optical and hydrophobic properties of films. ► The chromium oxynitride films changes from hydrophilic to hydrophobic. ► The surface energy is sensitive to the contact angle and optical properties like n, Eg, %T are tailored.