Fluorocarbon thin film with superhydrophobic property prepared by pyrolysis of hexafluoropropylene oxide

► We successfully prepared nanostructured fluorocarbon thin films using CVD method without any catalysts at low pyrolysis temperature (200-300 °C) of HFPO. ► The films show disparate morphology, high content of CF2 (>90%), which are also characteristic of bulk PTFE. ► The film deposited at 300 °C shows superhydrophobic property (water contact angle of 172.7°).