Understanding of gas phase deposition of reactive magnetron sputtered TiO2 thin films and its correlation with bactericidal efficiency

► Influence of O2 flow rates on the gas phase plasma during TiO2 film deposition was studied. ► The plasma parameters were determined and correlated with the film properties. ► O2 flow rate affects crystallinity, surface bonding, hydrophilicity, band gap and particle size of TiO2 films. ► These were found to be decisive factors for antibacterial property. ► These were found to be decisive factors for antibacterial property.