Investigation of the structure of fluoroalkylsilanes deposited on alumina surface

► Preparation of fluoroalkylsilanes on alumina surface by using vapor phase deposition method was investigated. ► Confirmation of presence of modifiers molecules on the Al substrate by XPS, FT-IR and ToF-SIMS measurements was performed. ► Nanotribological studies of fluoroalkylsilanes films with different structure of head group were presented.