Luminescent properties of ZnO thin films treated by pulse-modulated high-power inductively coupled plasma

► An ultrasonic spray assisted chemical vapor deposition (spray-CVD) method was developed to deposit ZnO thin films. ► The effect of hydrogen plasma irradiation on luminescence properties of ZnO thin films was studied by using a pulse-modulated inductively coupled plasma technique. ► UV emission of ZnO thin films can be greatly enhanced by hydrogen plasma irradiation with appropriate irradiation conditions because non-radiative centers are passivated by H.