Structure and properties of (AlCrMnMoNiZrB0.1)Nx coatings prepared by reactive DC sputtering

► RN is N2-to-Ar flow ratios, which effect on the structure and properties of films. ► Amorphous and FCC structures can be achieved at low RN and high RN, respectively. ► Solid solution strengthening and lattice strain enhanced the hardness of films. ► The nitride film deposited at RN = 0.5 has a friction coefficient of 0.12. ► Adhesive wear is the dominant wear mechanism in the films.